The thermal diffusivity and thermal conductivity of amorphous CVD Si//3N//4 with high carbon content are lower than those of amorphous CVD Si//3N//4. The specific heat is independent of the carbon content. Structure is discussed in terms of the temperature dependence of thermal conductivity.
|Number of pages||8|
|Journal||Science Reports of the Research Institutes, Tohoku University, Series A: Physics, Chemistry and Metallurgy|
|Publication status||Published - 1981 Jan 1|
ASJC Scopus subject areas
- Condensed Matter Physics
- Metals and Alloys