Thermal plasmas for nanofabrication

Masaya Shigeta, Anthony B. Murphy

Research output: Contribution to journalArticlepeer-review

142 Citations (Scopus)

Abstract

In this paper, we review the recent progress in nanofabrication by thermal plasmas, and attempt to define some of the most important issues in the field. For synthesis of nanoparticles, the experimental studies in the past five years are briefly introduced; the theoretical and numerical modelling works of the past 20 years are reviewed with some detailed explanations. Also, the use of thermal plasmas to produce nanostructured films and coatings is described. A wide range of technologies have been developed, ranging from chemical vapour deposition processes to new plasma spraying processes. We present an overview of the different techniques and the important physical phenomena, as well as the requirements for future progress.

Original languageEnglish
Article number174025
JournalJournal of Physics D: Applied Physics
Volume44
Issue number17
DOIs
Publication statusPublished - 2011 May 4

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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