Thermal imaging with tapping mode using a bimetal oscillator formed at the end of a cantilever

Sang Jin Kim, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

Thermal detection based on the thermal shift of the resonant frequency of a bimetal resonator (Al/Si) is presented and demonstrated. The bimetal oscillator with a tip is fabricated at the end of a commercial silicon cantilever. The bimetal oscillator and the silicon cantilever have a resonance frequency of 441 and 91 kHz, respectively, and the measured temperature coefficients of the resonant frequency are -127× 10-6 /K and -115× 10-6 /K, respectively. It is demonstrated that self-oscillated resonant frequency of the bimetal oscillator changes in response to heat from a microheat source. Simultaneous measurements of topography and temperature profile with the temperature resolution of 0.12 K on a glass substrate heated using a thin chromium film microheater are successfully demonstrated. These results show potential abilities of the mechanical resonant thermal sensor.

Original languageEnglish
Article number033703
JournalReview of Scientific Instruments
Volume80
Issue number3
DOIs
Publication statusPublished - 2009

ASJC Scopus subject areas

  • Instrumentation

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