Abstract
We have deposited diamond-like carbon (DLC) films by pulsed laser deposition using a KrF excimer laser (248 nm), and have investigated the thermal effects on the structural properties of the DLC films by visible Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The Raman spectra show the G and D peaks near 1580 and 1370 cm-1, respectively. It has been clarified that the intensity of the D peak increases with the deposition temperature, indicating ordering of the a-C films. Fraction of the sp 3 bonds in the deposited films, as evaluated from the C1s-XPS peak, decreases with the deposition temperature. The Raman spectra for the films deposited at 150 °C show ordering of a-C by annealing, while the structure of the films deposited at room temperature does not change. When a laser repetition rate is decreased from 20 to 10 Hz, ordering of a-C was observed.
| Original language | English |
|---|---|
| Pages (from-to) | 98-103 |
| Number of pages | 6 |
| Journal | Thin Solid Films |
| Volume | 467 |
| Issue number | 1-2 |
| DOIs | |
| Publication status | Published - 2004 Nov 22 |
Keywords
- Diamond-like carbon
- Pulsed laser deposition
- Raman scattering
- X-ray photoelectron spectroscopy
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry