Thermal effects on structural properties of diamond-like carbon films prepared by pulsed laser deposition

H. Nakazawa, Y. Yamagata, M. Suemitsu, M. Mashita

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

Abstract

We have deposited diamond-like carbon (DLC) films by pulsed laser deposition using a KrF excimer laser (248 nm), and have investigated the thermal effects on the structural properties of the DLC films by visible Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The Raman spectra show the G and D peaks near 1580 and 1370 cm-1, respectively. It has been clarified that the intensity of the D peak increases with the deposition temperature, indicating ordering of the a-C films. Fraction of the sp 3 bonds in the deposited films, as evaluated from the C1s-XPS peak, decreases with the deposition temperature. The Raman spectra for the films deposited at 150 °C show ordering of a-C by annealing, while the structure of the films deposited at room temperature does not change. When a laser repetition rate is decreased from 20 to 10 Hz, ordering of a-C was observed.

Original languageEnglish
Pages (from-to)98-103
Number of pages6
JournalThin Solid Films
Volume467
Issue number1-2
DOIs
Publication statusPublished - 2004 Nov 22

Keywords

  • Diamond-like carbon
  • Pulsed laser deposition
  • Raman scattering
  • X-ray photoelectron spectroscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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