Thermal effects on structural properties of diamond-like carbon films prepared by pulsed laser deposition

H. Nakazawa; Y. Yamagata; M. Suemitsu; M. Mashita

doi:10.1016/j.tsf.2004.03.013

Thermal effects on structural properties of diamond-like carbon films prepared by pulsed laser deposition

H. Nakazawa, Y. Yamagata, M. Suemitsu, M. Mashita

Information Devices Division

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

We have deposited diamond-like carbon (DLC) films by pulsed laser deposition using a KrF excimer laser (248 nm), and have investigated the thermal effects on the structural properties of the DLC films by visible Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The Raman spectra show the G and D peaks near 1580 and 1370 cm^-1, respectively. It has been clarified that the intensity of the D peak increases with the deposition temperature, indicating ordering of the a-C films. Fraction of the sp ³ bonds in the deposited films, as evaluated from the C1s-XPS peak, decreases with the deposition temperature. The Raman spectra for the films deposited at 150 °C show ordering of a-C by annealing, while the structure of the films deposited at room temperature does not change. When a laser repetition rate is decreased from 20 to 10 Hz, ordering of a-C was observed.

Original language	English
Pages (from-to)	98-103
Number of pages	6
Journal	Thin Solid Films
Volume	467
Issue number	1-2
DOIs	https://doi.org/10.1016/j.tsf.2004.03.013
Publication status	Published - 2004 Nov 22

Keywords

Diamond-like carbon
Pulsed laser deposition
Raman scattering
X-ray photoelectron spectroscopy

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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title = "Thermal effects on structural properties of diamond-like carbon films prepared by pulsed laser deposition",

abstract = "We have deposited diamond-like carbon (DLC) films by pulsed laser deposition using a KrF excimer laser (248 nm), and have investigated the thermal effects on the structural properties of the DLC films by visible Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The Raman spectra show the G and D peaks near 1580 and 1370 cm-1, respectively. It has been clarified that the intensity of the D peak increases with the deposition temperature, indicating ordering of the a-C films. Fraction of the sp 3 bonds in the deposited films, as evaluated from the C1s-XPS peak, decreases with the deposition temperature. The Raman spectra for the films deposited at 150 °C show ordering of a-C by annealing, while the structure of the films deposited at room temperature does not change. When a laser repetition rate is decreased from 20 to 10 Hz, ordering of a-C was observed.",

keywords = "Diamond-like carbon, Pulsed laser deposition, Raman scattering, X-ray photoelectron spectroscopy",

author = "H. Nakazawa and Y. Yamagata and M. Suemitsu and M. Mashita",

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T1 - Thermal effects on structural properties of diamond-like carbon films prepared by pulsed laser deposition

AU - Nakazawa, H.

AU - Yamagata, Y.

AU - Suemitsu, M.

AU - Mashita, M.

PY - 2004/11/22

Y1 - 2004/11/22

N2 - We have deposited diamond-like carbon (DLC) films by pulsed laser deposition using a KrF excimer laser (248 nm), and have investigated the thermal effects on the structural properties of the DLC films by visible Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The Raman spectra show the G and D peaks near 1580 and 1370 cm-1, respectively. It has been clarified that the intensity of the D peak increases with the deposition temperature, indicating ordering of the a-C films. Fraction of the sp 3 bonds in the deposited films, as evaluated from the C1s-XPS peak, decreases with the deposition temperature. The Raman spectra for the films deposited at 150 °C show ordering of a-C by annealing, while the structure of the films deposited at room temperature does not change. When a laser repetition rate is decreased from 20 to 10 Hz, ordering of a-C was observed.

AB - We have deposited diamond-like carbon (DLC) films by pulsed laser deposition using a KrF excimer laser (248 nm), and have investigated the thermal effects on the structural properties of the DLC films by visible Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The Raman spectra show the G and D peaks near 1580 and 1370 cm-1, respectively. It has been clarified that the intensity of the D peak increases with the deposition temperature, indicating ordering of the a-C films. Fraction of the sp 3 bonds in the deposited films, as evaluated from the C1s-XPS peak, decreases with the deposition temperature. The Raman spectra for the films deposited at 150 °C show ordering of a-C by annealing, while the structure of the films deposited at room temperature does not change. When a laser repetition rate is decreased from 20 to 10 Hz, ordering of a-C was observed.

KW - Diamond-like carbon

KW - Pulsed laser deposition

KW - Raman scattering

KW - X-ray photoelectron spectroscopy

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