Thermal change of unstable stacking faults in β-SiC

Naoto Shirahata, Kazunori Kijima, Xiuliang Ma, Yuichi Ikuhara

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

The thermal change of unstable stacking faults (USFs) in ultrafine and highly pure β-SiC powder synthesized by the plasma chemical vapor deposition (plasma-CVD) method was studied by high-resolution transmission electron microscopy (HR-TEM). The number of USFs, which were frequently observed in as-synthesized powder, decreased at elevated temperatures in an Ar atmosphere. In contrast, the number of general stacking faults (GSFs) increased with decreasing number of USFs. Moreover, a type of stacking fault that was geometrically more unstable than USF was observed in the specimen after heat treatment. In the present study, the annihilation process of USFs observed in the specimen before heat treatment is discussed.

Original languageEnglish
Pages (from-to)3969-3974
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume40
Issue number6 A
DOIs
Publication statusPublished - 2001 Jun
Externally publishedYes

Keywords

  • General stacking fault
  • Heat treatment
  • High-resolution transmission electron microscopy
  • Plasma-CVD
  • Unstable stacking fault
  • β-SiC

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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