Thermal barrier coatings produced by chemical vapor deposition

J. R. Vargas Garcia, Takashi Goto

Research output: Contribution to journalReview articlepeer-review

67 Citations (Scopus)


Yttria stabilized zirconia (YSZ) can be employed as thermal barrier coatings (TBCs) on Ni-based super alloys in gas turbines and aircraft engines. The YSZ coatings have been fabricated by atmospheric plasma spraying or electron-beam physical vapor deposition. The increase in operation temperature of gas turbines demands another fabrication process to obtain high quality TBCs. Chemical vapor deposition (CVD) can be an alternative route to prepare TBCs due to excellent conformal coverage and columnar microstructure. This paper reviews the fabrication of YSZ films by conventional thermal CVD and plasma CVD intended for TBCs. A new laser CVD developed by our group with a high deposition rate of 660 μm h-1 was also briefly introduced.

Original languageEnglish
Pages (from-to)397-402
Number of pages6
JournalScience and Technology of Advanced Materials
Issue number4
Publication statusPublished - 2003 Jul 1


  • Chemical vapor deposition
  • Columnar structure
  • Deposition rate
  • Laser CVD
  • Plasma CVD
  • Thermal barrier coating
  • Yttria stabilized zirconia

ASJC Scopus subject areas

  • Materials Science(all)


Dive into the research topics of 'Thermal barrier coatings produced by chemical vapor deposition'. Together they form a unique fingerprint.

Cite this