Theoretical electromagnetic field calculation of a floating metal wire for inductively coupled micro plasma using a spiral coil

Kyyoul Yun, Keisuke Fujisaki, Minoru Sasaki

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

According to calculation, one of the reasons which enables inductively coupled plasma generation with low ignition power with the use of a floating metal wire is that the electrical field intensity is concentrated at the end of the floating metal wire. The electrical field intensity with the floating metal wire is not affected by the properties of the materials, such as the permeability, electrical conductivity or permittivity. It is the same result obtained through experimental ignition power data. The electrical field intensity at the upstream side increases with increments of the floating metal wire length, while the electrical field strength at the downstream side decreases with increments of the floating metal wire length. This is the possible reason for the decrease of ignition power for plasma ignition with increments of the floating metal wire length. In this paper, the function of the floating metal wire in the spiral exciting coil is investigated based on the electromagnetic field calculation using the finite element method (FEM) and is compared with the experimental results.

Original languageEnglish
Article number01AA02
JournalJapanese journal of applied physics
Volume52
Issue number1 PART2
DOIs
Publication statusPublished - 2013 Jan 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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