Theoretical Consideration of Mismatch Compensation for MEMS Resonator Having Unaligned Principle Axes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, a theoretical aspect of frequency and damping mismatch compensation in a MEMS rate integrating gyroscope (RIG) controlled by CW and CCW rotational modes is reported. The mismatches of a resonator could be compensated by the amplitudes and phases of the driving signals, even if the principle axes of stiffness and damping are not aligned to the X-Y coordinate. The proposed theoretical formula well consistent with the previously reported experimental results, as well as the numerical simulation.

Original languageEnglish
Title of host publicationINERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728150994
DOIs
Publication statusPublished - 2021 Mar 22
Event8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021 - Virtual, Kailua-Kona, United States
Duration: 2021 Mar 222021 Mar 25

Publication series

NameINERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021
Country/TerritoryUnited States
CityVirtual, Kailua-Kona
Period21/3/2221/3/25

ASJC Scopus subject areas

  • Control and Optimization
  • Instrumentation

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