Theoretical calculation of the reading output from a micro thermal sensors for precision positioning

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a numerical analysis of heat flow in a linear encoder system, in which a micro thermal sensor is employed to read line pattern structures on a scale grating. A simple heat transfer model of the interface between the micro thermal sensor and a scale grating is established, and the heat flow at the sensor-grating interface is estimated for the cases of employing scale gratings having line pattern structures with a sinusoidal profile and a triangular profile, respectively, to search for the possibility of employing the output signal from the micro thermal sensor for displacement measurement.

Original languageEnglish
Title of host publicationProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
EditorsTeen-Hang Meen
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages24-25
Number of pages2
ISBN (Electronic)9781538656099
DOIs
Publication statusPublished - 2019 Jan 16
Event2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 - Yunlin, Taiwan, Province of China
Duration: 2018 Nov 162018 Nov 18

Publication series

NameProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Conference

Conference2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
CountryTaiwan, Province of China
CityYunlin
Period18/11/1618/11/18

Keywords

  • Displacement measurement
  • Encoder
  • Heat flow
  • Micro thermal sensor

ASJC Scopus subject areas

  • Biomedical Engineering
  • Mechanics of Materials
  • Safety, Risk, Reliability and Quality
  • Management, Monitoring, Policy and Law
  • Education
  • Fluid Flow and Transfer Processes
  • Industrial and Manufacturing Engineering

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