Theoretical calculation of the reading output from a micro thermal sensors for precision positioning

Yuki Shimizu; Ayaka Ishida; Hiraku Matsukuma; Wei Gao

doi:10.1109/AMCON.2018.8614751

Theoretical calculation of the reading output from a micro thermal sensors for precision positioning

Yuki Shimizu, Ayaka Ishida, Hiraku Matsukuma, Wei Gao

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents a numerical analysis of heat flow in a linear encoder system, in which a micro thermal sensor is employed to read line pattern structures on a scale grating. A simple heat transfer model of the interface between the micro thermal sensor and a scale grating is established, and the heat flow at the sensor-grating interface is estimated for the cases of employing scale gratings having line pattern structures with a sinusoidal profile and a triangular profile, respectively, to search for the possibility of employing the output signal from the micro thermal sensor for displacement measurement.

Original language	English
Title of host publication	Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
Editors	Teen-Hang Meen
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	24-25
Number of pages	2
ISBN (Electronic)	9781538656099
DOIs	https://doi.org/10.1109/AMCON.2018.8614751
Publication status	Published - 2019 Jan 16
Event	2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 - Yunlin, Taiwan, Province of China Duration: 2018 Nov 16 → 2018 Nov 18

Publication series

Name	Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Conference

Conference	2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
Country	Taiwan, Province of China
City	Yunlin
Period	18/11/16 → 18/11/18

Keywords

Displacement measurement
Encoder
Heat flow
Micro thermal sensor

ASJC Scopus subject areas

Biomedical Engineering
Mechanics of Materials
Safety, Risk, Reliability and Quality
Management, Monitoring, Policy and Law
Education
Fluid Flow and Transfer Processes
Industrial and Manufacturing Engineering

Access to Document

10.1109/AMCON.2018.8614751

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Cite this

Shimizu, Y., Ishida, A., Matsukuma, H., & Gao, W. (2019). Theoretical calculation of the reading output from a micro thermal sensors for precision positioning. In T-H. Meen (Ed.), Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 (pp. 24-25). [8614751] (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AMCON.2018.8614751

Theoretical calculation of the reading output from a micro thermal sensors for precision positioning. / Shimizu, Yuki; Ishida, Ayaka; Matsukuma, Hiraku ; Gao, Wei.

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. ed. / Teen-Hang Meen. Institute of Electrical and Electronics Engineers Inc., 2019. p. 24-25 8614751 (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Shimizu, Y, Ishida, A, Matsukuma, H & Gao, W 2019, Theoretical calculation of the reading output from a micro thermal sensors for precision positioning. in T-H Meen (ed.), Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018., 8614751, Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, Institute of Electrical and Electronics Engineers Inc., pp. 24-25, 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, Yunlin, Taiwan, Province of China, 18/11/16. https://doi.org/10.1109/AMCON.2018.8614751

Shimizu Y, Ishida A, Matsukuma H , Gao W. Theoretical calculation of the reading output from a micro thermal sensors for precision positioning. In Meen T-H, editor, Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. Institute of Electrical and Electronics Engineers Inc. 2019. p. 24-25. 8614751. (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018). https://doi.org/10.1109/AMCON.2018.8614751

Shimizu, Yuki ; Ishida, Ayaka ; Matsukuma, Hiraku ; Gao, Wei. / Theoretical calculation of the reading output from a micro thermal sensors for precision positioning. Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. editor / Teen-Hang Meen. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 24-25 (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018).

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abstract = "This paper presents a numerical analysis of heat flow in a linear encoder system, in which a micro thermal sensor is employed to read line pattern structures on a scale grating. A simple heat transfer model of the interface between the micro thermal sensor and a scale grating is established, and the heat flow at the sensor-grating interface is estimated for the cases of employing scale gratings having line pattern structures with a sinusoidal profile and a triangular profile, respectively, to search for the possibility of employing the output signal from the micro thermal sensor for displacement measurement.",

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