The coupled vibration of microcantilevers induced by the airflow is analyzed to develop high-speed information and sensing devices that use microactuator arrays. The conclusions are as follows: (1) Simple formulas that give the vibration coupling amplitude and damping ratio are derived by relapsing the cantilevers with strings of spheres, combining the airflow force of spheres with an ordinary beam equation. (2) By using the formulas, the coupling amplitude is found to increase as the beam size, beam gap, and internal friction decrease, and the damping ratio is found to increase as the beam becomes smaller. (3) The validity of theory is verified with actual size and enlarged model experiments.
|Number of pages||5|
|Journal||Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering|
|Publication status||Published - 1997 Jan 1|
- Damping ratio
ASJC Scopus subject areas
- Mechanical Engineering