Theoretical and experimental analysis of coupled vibration of microcantilever array

Takao Ohsawa, Hiroshi Abe, Hiroshi Hosaka, Hiroki Kuwano, Kiyoshi Itao

Research output: Contribution to journalArticle

Abstract

The coupled vibration of microcantilevers induced by the airflow is analyzed to develop high-speed information and sensing devices that use microactuator arrays. The conclusions are as follows: (1) Simple formulas that give the vibration coupling amplitude and damping ratio are derived by relapsing the cantilevers with strings of spheres, combining the airflow force of spheres with an ordinary beam equation. (2) By using the formulas, the coupling amplitude is found to increase as the beam size, beam gap, and internal friction decrease, and the damping ratio is found to increase as the beam becomes smaller. (3) The validity of theory is verified with actual size and enlarged model experiments.

Original languageEnglish
Pages (from-to)977-981
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume63
Issue number7
DOIs
Publication statusPublished - 1997 Jan 1
Externally publishedYes

Keywords

  • Damping ratio
  • Microactuator
  • Microcantilever
  • Vibration

ASJC Scopus subject areas

  • Mechanical Engineering

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