Abstract
Among the important properties required for surface acoustic waves (SAW) substrates arc a large electromechanical coupling coefficient (k2), small temperature coefficient of frequency (TCP) and low propagation loss. The LiNbO3 and LiTaO3 have good properties as the SAW substrates with a large size. Unfortunately, these possess the defect of having large values of TCP. In this paper, SAW-bonded composite substrates with a large k2, small TCP, low propagation loss and no dispersion using conventional bonders are investigated theoretically and experimentally. The propagation characteristics of SAWs under strained piezoelectric crystals using the higher-order elasticity theory have been analyzed. The theoretical results show zero TCP on LiNbO3/SiO2 substrates. The experimental results for LiNbO3/glass substrates revealed a TCP of [-19 ppm/°C]. The propagation properties were almost the same as those of the single crystal.
Original language | English |
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Pages (from-to) | 3032-3035 |
Number of pages | 4 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 39 |
Issue number | 5 B |
DOIs | |
Publication status | Published - 2000 |
Keywords
- Composite substrate
- Nonlinear SAW propagation
- Static strain material
- Surface acoustic wave
- Temperature stable substrate
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)