Theoretical analysis of surface acoustic wave propagation characteristics under strained media and applications for high temperature stable high coupling surface acoustic wave substrates

Kazuhiko Yamanouchi, Kenji Kotani, Hiroyuki Odagawa, Yasuo Cho

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Among the important properties required for surface acoustic waves (SAW) substrates arc a large electromechanical coupling coefficient (k2), small temperature coefficient of frequency (TCP) and low propagation loss. The LiNbO3 and LiTaO3 have good properties as the SAW substrates with a large size. Unfortunately, these possess the defect of having large values of TCP. In this paper, SAW-bonded composite substrates with a large k2, small TCP, low propagation loss and no dispersion using conventional bonders are investigated theoretically and experimentally. The propagation characteristics of SAWs under strained piezoelectric crystals using the higher-order elasticity theory have been analyzed. The theoretical results show zero TCP on LiNbO3/SiO2 substrates. The experimental results for LiNbO3/glass substrates revealed a TCP of [-19 ppm/°C]. The propagation properties were almost the same as those of the single crystal.

Original languageEnglish
Pages (from-to)3032-3035
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume39
Issue number5 B
DOIs
Publication statusPublished - 2000

Keywords

  • Composite substrate
  • Nonlinear SAW propagation
  • Static strain material
  • Surface acoustic wave
  • Temperature stable substrate

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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