The synthesis of diamond particles by a filament assisted CO2 laser induced CVD

Joseph Gaze; Tatsuo Obata; Naoki Oyanagi; Hirosumi Izawa; Weilie Zhou; Michiko Kusunoki; Yuichi Ikuhara

doi:10.1016/S0168-583X(96)00386-2

The synthesis of diamond particles by a filament assisted CO₂ laser induced CVD

Joseph Gaze, Tatsuo Obata, Naoki Oyanagi, Hirosumi Izawa, Weilie Zhou, Michiko Kusunoki, Yuichi Ikuhara

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

Diamond particles were synthesized by a filament assisted CO₂ laser induced CVD technique on a silicon substrate in a hydrogen environment. The deposition was carried out using a gaseous mixture of CH₄ and H₂, which flowed through a beam generator equipped with a tiny orifice and positioned above a refractory filament. The filament was separated 25 mm from the substrate and a cw-CO₂ laser was used to irradiate the substrate's surface. The presence of diamond particles on the substrate was confirmed by Raman Spectroscopy and Scanning Electron Microscope. The factors that hindered the synthesis of a continuous diamond film were investigated from the results of EDS, TEM analysis, HREM analysis, and Electron Diffraction Patterns.

Original language	English
Pages (from-to)	427-431
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	121
Issue number	1-4
DOIs	https://doi.org/10.1016/S0168-583X(96)00386-2
Publication status	Published - 1997 Jan

Keywords

CO laser
Diamond particles
EDS
Raman spectroscopy
SEM
TEM

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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The synthesis of diamond particles by a filament assisted CO₂ laser induced CVD. / Gaze, Joseph; Obata, Tatsuo; Oyanagi, Naoki; Izawa, Hirosumi; Zhou, Weilie; Kusunoki, Michiko; Ikuhara, Yuichi.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 121, No. 1-4, 01.1997, p. 427-431.

Research output: Contribution to journal › Article › peer-review

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abstract = "Diamond particles were synthesized by a filament assisted CO2 laser induced CVD technique on a silicon substrate in a hydrogen environment. The deposition was carried out using a gaseous mixture of CH4 and H2, which flowed through a beam generator equipped with a tiny orifice and positioned above a refractory filament. The filament was separated 25 mm from the substrate and a cw-CO2 laser was used to irradiate the substrate's surface. The presence of diamond particles on the substrate was confirmed by Raman Spectroscopy and Scanning Electron Microscope. The factors that hindered the synthesis of a continuous diamond film were investigated from the results of EDS, TEM analysis, HREM analysis, and Electron Diffraction Patterns.",

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author = "Joseph Gaze and Tatsuo Obata and Naoki Oyanagi and Hirosumi Izawa and Weilie Zhou and Michiko Kusunoki and Yuichi Ikuhara",

note = "Funding Information: This work was undertakenw ithin the programmeA d-vancedC hemical ProcessingT echnology,p artly funded and supervisedb y the Advanced Chemical Processing TechnologyR esearchA ssociation( ACTA), organizedu n-der the New Energy and IndustrialT echnologyD evelop-ment( NEDO), undert hea uspiceso f theI ndustrialS cience and TechnologyF rontierp rogrammew, hich is conducted by the Agency of Industrial Science and Technology, Ministry of InternationaTl radea nd Industry.",

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AU - Kusunoki, Michiko

AU - Ikuhara, Yuichi

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AB - Diamond particles were synthesized by a filament assisted CO2 laser induced CVD technique on a silicon substrate in a hydrogen environment. The deposition was carried out using a gaseous mixture of CH4 and H2, which flowed through a beam generator equipped with a tiny orifice and positioned above a refractory filament. The filament was separated 25 mm from the substrate and a cw-CO2 laser was used to irradiate the substrate's surface. The presence of diamond particles on the substrate was confirmed by Raman Spectroscopy and Scanning Electron Microscope. The factors that hindered the synthesis of a continuous diamond film were investigated from the results of EDS, TEM analysis, HREM analysis, and Electron Diffraction Patterns.

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