The synthesis of diamond particles by a filament assisted CO2 laser induced CVD

Joseph Gaze, Tatsuo Obata, Naoki Oyanagi, Hirosumi Izawa, Weilie Zhou, Michiko Kusunoki, Yuichi Ikuhara

    Research output: Contribution to journalArticle

    9 Citations (Scopus)

    Abstract

    Diamond particles were synthesized by a filament assisted CO2 laser induced CVD technique on a silicon substrate in a hydrogen environment. The deposition was carried out using a gaseous mixture of CH4 and H2, which flowed through a beam generator equipped with a tiny orifice and positioned above a refractory filament. The filament was separated 25 mm from the substrate and a cw-CO2 laser was used to irradiate the substrate's surface. The presence of diamond particles on the substrate was confirmed by Raman Spectroscopy and Scanning Electron Microscope. The factors that hindered the synthesis of a continuous diamond film were investigated from the results of EDS, TEM analysis, HREM analysis, and Electron Diffraction Patterns.

    Original languageEnglish
    Pages (from-to)427-431
    Number of pages5
    JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
    Volume121
    Issue number1-4
    DOIs
    Publication statusPublished - 1997 Jan

    Keywords

    • CO laser
    • Diamond particles
    • EDS
    • Raman spectroscopy
    • SEM
    • TEM

    ASJC Scopus subject areas

    • Nuclear and High Energy Physics
    • Instrumentation

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