The structures for electrostatic servo capacitive vacuum sensors

Yuelin Wang, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


Two kinds of electrostatic servo capacitive vacuum sensors have been successfully fabricated using P+ + silicon etch-stop and vacuum anodic-bonding techniques. In order to maintain the reference cavity at high vacuum, a non-evaporable getter (NEG) is used as a small vacuum pump. The dynamic range of the sensor can be extended by a servo system. The pressure responses of the sensors are good. The plot of servo voltage versus pressure is measured and the theoretical data agree with the experimental results.

Original languageEnglish
Pages (from-to)213-217
Number of pages5
JournalSensors and Actuators, A: Physical
Issue number1-3
Publication statusPublished - 1998 Apr 1


  • Sensors
  • Servo
  • Vacuum

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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