Abstract
Two kinds of electrostatic servo capacitive vacuum sensors have been successfully fabricated using P+ + silicon etch-stop and vacuum anodic-bonding techniques. In order to maintain the reference cavity at high vacuum, a non-evaporable getter (NEG) is used as a small vacuum pump. The dynamic range of the sensor can be extended by a servo system. The pressure responses of the sensors are good. The plot of servo voltage versus pressure is measured and the theoretical data agree with the experimental results.
| Original language | English |
|---|---|
| Pages (from-to) | 213-217 |
| Number of pages | 5 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 66 |
| Issue number | 1-3 |
| DOIs | |
| Publication status | Published - 1998 Apr 1 |
Keywords
- Sensors
- Servo
- Vacuum
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering