The road to recovery from the great east Japan earthquake in micro/nano machining research and education center, Tohoku university

Toshiya Kojima, Tetsu Tanaka

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)413-416
Number of pages4
JournalJournal of the Vacuum Society of Japan
Volume55
Issue number9
DOIs
Publication statusPublished - 2012

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation
  • Surfaces and Interfaces
  • Spectroscopy

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