TY - JOUR
T1 - The polishing effect of zno thin films on saw filters
AU - Kadota, Michio
AU - Kondo, Chikashi
AU - Ikeda, Toshiaki
AU - Kasanami, Tohru
PY - 1990/1/1
Y1 - 1990/1/1
N2 - SAW filters in a structure of ZnO lDT glass, have periodic convex and concave roughness on the surface of ZnO thin films which is caused by lDT electrodes. This investigation reports that the convex and concave roughness affects the SAW velocity, and mechanical polishing of the ZnO thin films has great effect on SAW filter frequency characteristics.
AB - SAW filters in a structure of ZnO lDT glass, have periodic convex and concave roughness on the surface of ZnO thin films which is caused by lDT electrodes. This investigation reports that the convex and concave roughness affects the SAW velocity, and mechanical polishing of the ZnO thin films has great effect on SAW filter frequency characteristics.
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U2 - 10.7567/JJAPS.29S1.159
DO - 10.7567/JJAPS.29S1.159
M3 - Article
AN - SCOPUS:84956209512
VL - 29
SP - 159
EP - 161
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
ER -