The polishing effect of zno thin films on saw filters

Michio Kadota, Chikashi Kondo, Toshiaki Ikeda, Tohru Kasanami

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

SAW filters in a structure of ZnO lDT glass, have periodic convex and concave roughness on the surface of ZnO thin films which is caused by lDT electrodes. This investigation reports that the convex and concave roughness affects the SAW velocity, and mechanical polishing of the ZnO thin films has great effect on SAW filter frequency characteristics.

Original languageEnglish
Pages (from-to)159-161
Number of pages3
JournalJapanese journal of applied physics
Volume29
DOIs
Publication statusPublished - 1990 Jan 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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