The performance of the IMR three-dimensional atom probe

K. Hono, R. Okano, T. Saeda, T. Sakurai

    Research output: Contribution to journalArticlepeer-review

    14 Citations (Scopus)

    Abstract

    This paper reports the design and the performance of a three-dimensional atom probe which was recently constructed at the Institute for Materials Research, Tohoku University. The new atom probe consists of both a reflectron type time-of-flight atom probe (ToFAP) and a position sensitive atom probe (PoSAP). These are controlled with a CAMAC based controlling system interfaced with a Macintosh computer. The performance of the reflectron type atom probe and the position sensitive atom probe is demonstrated.

    Original languageEnglish
    Pages (from-to)453-459
    Number of pages7
    JournalApplied Surface Science
    Volume87-88
    Issue numberC
    DOIs
    Publication statusPublished - 1995 Mar 2

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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