The micro-nanoformability of Pt-based metallic glass and the nanoforming of three-dimensional structures

Yasunori Saotome; Kenichi Imai; Shigeo Shioda; Susumu Shimizu; Tao Zhang; Akihisa Inoue

doi:10.1016/S0966-9795(02)00135-8

The micro-nanoformability of Pt-based metallic glass and the nanoforming of three-dimensional structures

Yasunori Saotome, Kenichi Imai, Shigeo Shioda, Susumu Shimizu, Tao Zhang, Akihisa Inoue

Research output: Contribution to journal › Article › peer-review

142 Citations (Scopus)

Abstract

Pt_48.75Pd_9.75Cu_19.5P₂₂ amorphous alloy exhibits obvious glass transition behavior at a temperature of T_g = 502 K, which is below the crystallization temperature T_x = 588 K, and develops a supercooled liquid state in a wide temperature range of ΔT_x (= T_x-T_g) = 86 K. The present paper investigates the macroscopic and microscopic deformation behavior of the material and the possibility of micro-nano forming as a fabrication method and material for nano-devices. On a macroscopic scale, the material exhibits a Newtonian viscous flow in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, we fabricated V-grooved micro dies of (100) Si by a silicon process. The V-groove dies are from 100 nm to 1 μm wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micro-nanomaterials for micro-nano devices.

Original language	English
Pages (from-to)	1241-1247
Number of pages	7
Journal	Intermetallics
Volume	10
Issue number	11-12
DOIs	https://doi.org/10.1016/S0966-9795(02)00135-8
Publication status	Published - 2002 Nov
Externally published	Yes

Keywords

B. Glasses, metallic
C. Superplastic forming

ASJC Scopus subject areas

Chemistry(all)
Mechanics of Materials
Mechanical Engineering
Metals and Alloys
Materials Chemistry

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10.1016/S0966-9795(02)00135-8

Cite this

@article{c6fc828b9bb544ba8f0883dedae4decf,

title = "The micro-nanoformability of Pt-based metallic glass and the nanoforming of three-dimensional structures",

abstract = "Pt48.75Pd9.75Cu19.5P22 amorphous alloy exhibits obvious glass transition behavior at a temperature of Tg = 502 K, which is below the crystallization temperature Tx = 588 K, and develops a supercooled liquid state in a wide temperature range of ΔTx (= Tx-Tg) = 86 K. The present paper investigates the macroscopic and microscopic deformation behavior of the material and the possibility of micro-nano forming as a fabrication method and material for nano-devices. On a macroscopic scale, the material exhibits a Newtonian viscous flow in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, we fabricated V-grooved micro dies of (100) Si by a silicon process. The V-groove dies are from 100 nm to 1 μm wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micro-nanomaterials for micro-nano devices.",

keywords = "B. Glasses, metallic, C. Superplastic forming",

author = "Yasunori Saotome and Kenichi Imai and Shigeo Shioda and Susumu Shimizu and Tao Zhang and Akihisa Inoue",

year = "2002",

month = nov,

doi = "10.1016/S0966-9795(02)00135-8",

language = "English",

volume = "10",

pages = "1241--1247",

journal = "Intermetallics",

issn = "0966-9795",

publisher = "Elsevier Limited",

number = "11-12",

}

TY - JOUR

T1 - The micro-nanoformability of Pt-based metallic glass and the nanoforming of three-dimensional structures

AU - Saotome, Yasunori

AU - Imai, Kenichi

AU - Shioda, Shigeo

AU - Shimizu, Susumu

AU - Zhang, Tao

AU - Inoue, Akihisa

PY - 2002/11

Y1 - 2002/11

N2 - Pt48.75Pd9.75Cu19.5P22 amorphous alloy exhibits obvious glass transition behavior at a temperature of Tg = 502 K, which is below the crystallization temperature Tx = 588 K, and develops a supercooled liquid state in a wide temperature range of ΔTx (= Tx-Tg) = 86 K. The present paper investigates the macroscopic and microscopic deformation behavior of the material and the possibility of micro-nano forming as a fabrication method and material for nano-devices. On a macroscopic scale, the material exhibits a Newtonian viscous flow in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, we fabricated V-grooved micro dies of (100) Si by a silicon process. The V-groove dies are from 100 nm to 1 μm wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micro-nanomaterials for micro-nano devices.

AB - Pt48.75Pd9.75Cu19.5P22 amorphous alloy exhibits obvious glass transition behavior at a temperature of Tg = 502 K, which is below the crystallization temperature Tx = 588 K, and develops a supercooled liquid state in a wide temperature range of ΔTx (= Tx-Tg) = 86 K. The present paper investigates the macroscopic and microscopic deformation behavior of the material and the possibility of micro-nano forming as a fabrication method and material for nano-devices. On a macroscopic scale, the material exhibits a Newtonian viscous flow in a supercooled liquid state. An index of the microformability is also evaluated by the geometrical transferability of a die shape to the material. For this study, we fabricated V-grooved micro dies of (100) Si by a silicon process. The V-groove dies are from 100 nm to 1 μm wide. The material exhibits superior formability on micrometer and nanometer scales and may possibly be applied to micro-nanomaterials for micro-nano devices.

KW - B. Glasses, metallic

KW - C. Superplastic forming

UR - http://www.scopus.com/inward/record.url?scp=0036858453&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036858453&partnerID=8YFLogxK

U2 - 10.1016/S0966-9795(02)00135-8

DO - 10.1016/S0966-9795(02)00135-8

M3 - Article

AN - SCOPUS:0036858453

SN - 0966-9795

VL - 10

SP - 1241

EP - 1247

JO - Intermetallics

JF - Intermetallics

IS - 11-12

ER -

The micro-nanoformability of Pt-based metallic glass and the nanoforming of three-dimensional structures

Abstract

Keywords

ASJC Scopus subject areas

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