The micro-formability of Zr-based amorphous alloys in the supercooled liquid state and their application to micro-dies

Yasunori Saotome, Seiji Miwa, Tao Zhang, Akihisa Inoue

Research output: Contribution to journalConference article

111 Citations (Scopus)

Abstract

Zr-based amorphous alloys exhibit an obvious glass transition phenomenon and supercooled liquid state over a wide temperature range. In the present paper, the authors study the macroscopic and microscopic deformation behavior of Zr-Al-Cu and Zr-Al-Cu-Ni amorphous alloys. On a macroscopic scale, the materials exhibit a Newtonian viscous flow in the supercooled liquid state. To evaluate the micro-formability of the materials, the authors developed an evaluation system using a micro-V-grooved die made of (1 0 0) silicon that has been processed by electron beam lithography and anisotropic etching and employed this system to quantitatively evaluate the microscopic formability of the materials. The V-groove is from 1 to 20 μm wide and has a base angle of 70.6°. The material was subjected to the newly developed micro-forging apparatus and was die forged with micro-V-grooved dies. After the deformation, the shape of the specimen was measured using a three-dimensional shape measurement system with a highly sensitive detector in a scanning electron microscope. These geometrical analyses of deformed specimens confirmed the superior formability on a micrometer scale and indicated the possibility of fabricating very fine micro-parts such as those for micro-electro-mechanical systems (MEMS). Furthermore, the material is stable under the glass transition temperature Tg, and can thus be used as a fine micro-forging die for some plastic materials or other amorphous alloys with a glass transition temperature below Tg. In the present paper, it was confirmed that Zr-Al-Cu amorphous alloy could be used as a micro-die for forming La-Al-Ni amorphous alloy. As a result, it was demonstrated that amorphous alloys are potential micro-materials for fabricating various micro-parts or micro-dies because of their superior mechanical characteristics and homogeneity on a microscopic scale.

Original languageEnglish
Pages (from-to)64-69
Number of pages6
JournalJournal of Materials Processing Technology
Volume113
Issue number1-3
DOIs
Publication statusPublished - 2001 Jun 15
Event5th Asia Pacific Conference on Materials Processing - Seoul, Korea, Republic of
Duration: 2001 Jun 252001 Jun 25

Keywords

  • Amorphous alloy
  • Micro-die
  • Micro-formability
  • Micro-machine
  • Newtonian viscous flow
  • Supercooled liquid

ASJC Scopus subject areas

  • Ceramics and Composites
  • Computer Science Applications
  • Metals and Alloys
  • Industrial and Manufacturing Engineering

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