The laser trapping probe for nano-CMM (1st report) - Positional detection principle of the laser trapping probe and its nature

Yasuhiro Takaya, Noriaki Sato, Satoru Takahashi, Takashi Miyoshi, Hiroki Shimizu, Manjiro Watanabe

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Engineering & Materials Science