The laser trapping probe for nano-CMM (1st report) - Positional detection principle of the laser trapping probe and its nature

Yasuhiro Takaya, Noriaki Sato, Satoru Takahashi, Takashi Miyoshi, Hiroki Shimizu, Manjiro Watanabe

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

This paper discusses a new probe technique, the so-called laser trapping probe, whose principle is based on the dynamic properties of optically trapped dielectric particles and the Linnik microscope interferometer. Computer simulations for trapping in air and theoretical analysis for interference fringe patterns are performed. By using the newly developed laser trapping probe experimental system, single-beam gradient-force optical traps of silica particles with the diameter of 8.0μm as microprobes are successfully demonstrated in air. And then, positional detection principle is established based on fringe changes with small displacement of the laser trapped probe sphere while approximating it to work surfaces. Measurement results for glass microspheres having NIST traceable mean diameter of 168±8.4μm show its potentials as the 3D nano-position sensing probe for nano-CMM.

Original languageEnglish
Pages (from-to)1081-1086
Number of pages6
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume66
Issue number7
DOIs
Publication statusPublished - 2000 Jul
Externally publishedYes

Keywords

  • Laser trapping
  • Linnik interferometer
  • Microparts
  • Microprobe
  • Nano-CMM
  • Positional detection probe

ASJC Scopus subject areas

  • Mechanical Engineering

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