TY - JOUR
T1 - The film formation dynamics in spin coating
AU - Ohara, Taku
AU - Matsumoto, Yoichiro
AU - Ohashi, Hideo
PY - 1989/1/1
Y1 - 1989/1/1
N2 - Thin film formation using the process of spin coating is investigated. The liquid film and surrounding gas phase two-dimensional (2-D) full governing equations with applicable boundary conditions are formulated. The heat and mass transfer that occurs in the gas and liquid phase and across the free surface, including the evaporation of solvent, are taken into account. The governing equations and boundary conditions are then reduced to a 1-D case based on the variables radial dependency. The detailed film formation process that commences at the start of the spinning and ends with the dry-up of the coated film is numerically simulated by utilizing the 1-D governing equations. The complex effects of various process parameters, e.g., spinning speed, initial solute concentration, and disk heating, are clarified by the present numerical analysis. It was found that the final film thickness is mainly determined at the time when the film thinning rate resulting from radial convection has the same order as the film thinning rate resulting from solvent evaporation.
AB - Thin film formation using the process of spin coating is investigated. The liquid film and surrounding gas phase two-dimensional (2-D) full governing equations with applicable boundary conditions are formulated. The heat and mass transfer that occurs in the gas and liquid phase and across the free surface, including the evaporation of solvent, are taken into account. The governing equations and boundary conditions are then reduced to a 1-D case based on the variables radial dependency. The detailed film formation process that commences at the start of the spinning and ends with the dry-up of the coated film is numerically simulated by utilizing the 1-D governing equations. The complex effects of various process parameters, e.g., spinning speed, initial solute concentration, and disk heating, are clarified by the present numerical analysis. It was found that the final film thickness is mainly determined at the time when the film thinning rate resulting from radial convection has the same order as the film thinning rate resulting from solvent evaporation.
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U2 - 10.1063/1.857520
DO - 10.1063/1.857520
M3 - Article
AN - SCOPUS:0001401656
VL - 1
SP - 1949
EP - 1959
JO - Physics of fluids. A, Fluid dynamics
JF - Physics of fluids. A, Fluid dynamics
SN - 0899-8213
IS - 12
ER -