The fabrication of metallic tips with a silicon cantilever for probe-based ferroelectric data storage and their durability experiments

Hirokazu Takahashi, Yasuhiro Mimura, Shuntaro Mori, Masahiro Ishimori, Atsushi Onoe, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

This paper reports on the development and evaluation of various probes consisting of silicon cantilevers with different types of tips made of platinum, ruthenium, chromium and conductive CVD diamond for probe-based ultrahigh density ferroelectric data storage. Using the metal-tip probes, data bits on a medium can be written and read with contact operation. Durability experiments of the various tips against a ferroelectric material are performed. The most detrimental tip wear occurred for platinum, while wear was much less apparent for the remaining tips. Reading and writing experiments on an LiTaO3 plate are also performed on the basis of scanning nonlinear dielectric microscopy using ruthenium-and chromium-tip probes.

Original languageEnglish
Article number365201
JournalNanotechnology
Volume20
Issue number36
DOIs
Publication statusPublished - 2009 Sep 9

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'The fabrication of metallic tips with a silicon cantilever for probe-based ferroelectric data storage and their durability experiments'. Together they form a unique fingerprint.

Cite this