The fabrication of integrated mass flow controllers

Masayoshi Esashi, Soohae Eoh, Tadayuki Matsuo, Segan Choi

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Two types of mass flow controller of which flow sensor and control valve are integrated on a silicon wafer were fabricated for fine gas control. One has a differential pressure type flow sensor and the other has a thermal flow sensor. Silicon micro valves which use small stack piezo actuator were developed for the control valve.

Original languageEnglish
Title of host publicationMicromechanics and MEMS
Subtitle of host publicationClassic and Seminal Papers to 1990
PublisherWiley-IEEE Press
Pages440-443
Number of pages4
ISBN (Electronic)9780470545263
ISBN (Print)0780310853, 9780780310858
DOIs
Publication statusPublished - 1997 Jan 1

ASJC Scopus subject areas

  • Computer Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)
  • Energy(all)

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    Esashi, M., Eoh, S., Matsuo, T., & Choi, S. (1997). The fabrication of integrated mass flow controllers. In Micromechanics and MEMS: Classic and Seminal Papers to 1990 (pp. 440-443). Wiley-IEEE Press. https://doi.org/10.1109/9780470545263.sect8