The effect of increasing interfacial strength in micro fluidic system for heat detection with micro-sandglass shaped interlocks

Zhuqing Wang, Mitsuteru Kimura, Takahito Ono

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

We present a useful method to increase interfacial strength for micro fluidic system of calorimetry biosensor. The micro-sandglass shaped posts were fabricated by deep silicon reactive ion etching and Tetramethyl ammonium hydroxide (25 wt% TMAH) anisotropic etching processes, sequentially. The interfacial strength can be controlled by structure of interlock which dependents on the TMAH etching time and diameter of micro pillar. The fabricated micro-standglass shaped interlocks were applied in micro fluidic structure to increase interfacial strength of micro fluidic structure. The detection result of reactive heat using calorimetry biosensor demonstrates that the interfacial strength can be increased by micro-standglass shaped interlocks to avoid leakage in micro fluidic system.

Original languageEnglish
Pages (from-to)633-640
Number of pages8
JournalMicrosystem Technologies
Volume25
Issue number2
DOIs
Publication statusPublished - 2019 Feb 4

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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