TY - JOUR
T1 - The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures
AU - Okazaki, Sohei
AU - Okazaki, Noriaki
AU - Sugaya, Hidetaka
AU - Zhao, Xiaoru
AU - Hasegawa, Ken
AU - Ahmet, Parhat
AU - Chikyo, Toyohiro
AU - Nishimura, Jun
AU - Fukumura, Tomoteru
AU - Kawasaki, Masashi
AU - Murakami, Makoto
AU - Mastumoto, Yuji
AU - Koinuma, Hideomi
AU - Hasegawa, Tetsuya
PY - 2003
Y1 - 2003
N2 - We developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.
AB - We developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.
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U2 - 10.1557/proc-804-jj9.21
DO - 10.1557/proc-804-jj9.21
M3 - Conference article
AN - SCOPUS:2442453367
VL - 804
SP - 249
EP - 254
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
SN - 0272-9172
T2 - Combinatorial and Artificial Intelligence Methods in Materials Science II
Y2 - 1 December 2003 through 4 December 2003
ER -