The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures

Sohei Okazaki; Noriaki Okazaki; Hidetaka Sugaya; Xiaoru Zhao; Ken Hasegawa; Parhat Ahmet; Toyohiro Chikyow; Jun Nishimura; Tomoteru Fukumura; Masashi Kawasaki; Makoto Murakami; Yuji Mastumoto; Hideomi Koinuma; Tetsuya Hasegawa

doi:10.1557/proc-804-jj9.21

The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures

Sohei Okazaki, Noriaki Okazaki, Hidetaka Sugaya, Xiaoru Zhao, Ken Hasegawa, Parhat Ahmet, Toyohiro Chikyow, Jun Nishimura, Tomoteru Fukumura, Masashi Kawasaki, Makoto Murakami, Yuji Mastumoto, Hideomi Koinuma, Tetsuya Hasegawa

Research output: Contribution to journal › Conference article › peer-review

Abstract

We developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.

Original language	English
Pages (from-to)	249-254
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	804
DOIs	https://doi.org/10.1557/proc-804-jj9.21
Publication status	Published - 2003
Event	Combinatorial and Artificial Intelligence Methods in Materials Science II - Boston, MA., United States Duration: 2003 Dec 1 → 2003 Dec 4

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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Okazaki, S., Okazaki, N., Sugaya, H., Zhao, X., Hasegawa, K., Ahmet, P., Chikyow, T., Nishimura, J., Fukumura, T., Kawasaki, M., Murakami, M., Mastumoto, Y., Koinuma, H., & Hasegawa, T. (2003). The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures. Materials Research Society Symposium - Proceedings, 804, 249-254. https://doi.org/10.1557/proc-804-jj9.21

The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures. / Okazaki, Sohei; Okazaki, Noriaki; Sugaya, Hidetaka; Zhao, Xiaoru; Hasegawa, Ken; Ahmet, Parhat; Chikyow, Toyohiro; Nishimura, Jun; Fukumura, Tomoteru; Kawasaki, Masashi; Murakami, Makoto; Mastumoto, Yuji; Koinuma, Hideomi; Hasegawa, Tetsuya.

In: Materials Research Society Symposium - Proceedings, Vol. 804, 2003, p. 249-254.

Research output: Contribution to journal › Conference article › peer-review

Okazaki, S, Okazaki, N, Sugaya, H, Zhao, X, Hasegawa, K, Ahmet, P, Chikyow, T, Nishimura, J, Fukumura, T, Kawasaki, M, Murakami, M, Mastumoto, Y, Koinuma, H & Hasegawa, T 2003, 'The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures', Materials Research Society Symposium - Proceedings, vol. 804, pp. 249-254. https://doi.org/10.1557/proc-804-jj9.21

Okazaki, Sohei ; Okazaki, Noriaki ; Sugaya, Hidetaka ; Zhao, Xiaoru ; Hasegawa, Ken ; Ahmet, Parhat ; Chikyow, Toyohiro ; Nishimura, Jun ; Fukumura, Tomoteru ; Kawasaki, Masashi ; Murakami, Makoto ; Mastumoto, Yuji ; Koinuma, Hideomi ; Hasegawa, Tetsuya. / The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures. In: Materials Research Society Symposium - Proceedings. 2003 ; Vol. 804. pp. 249-254.

@article{f54112895fc44318b18ac40b693cbf0a,

title = "The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures",

abstract = "We developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.",

author = "Sohei Okazaki and Noriaki Okazaki and Hidetaka Sugaya and Xiaoru Zhao and Ken Hasegawa and Parhat Ahmet and Toyohiro Chikyow and Jun Nishimura and Tomoteru Fukumura and Masashi Kawasaki and Makoto Murakami and Yuji Mastumoto and Hideomi Koinuma and Tetsuya Hasegawa",

year = "2003",

doi = "10.1557/proc-804-jj9.21",

language = "English",

volume = "804",

pages = "249--254",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

}

TY - JOUR

T1 - The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures

AU - Okazaki, Sohei

AU - Okazaki, Noriaki

AU - Sugaya, Hidetaka

AU - Zhao, Xiaoru

AU - Hasegawa, Ken

AU - Ahmet, Parhat

AU - Chikyow, Toyohiro

AU - Nishimura, Jun

AU - Fukumura, Tomoteru

AU - Kawasaki, Masashi

AU - Murakami, Makoto

AU - Mastumoto, Yuji

AU - Koinuma, Hideomi

AU - Hasegawa, Tetsuya

PY - 2003

Y1 - 2003

N2 - We developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.

AB - We developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.

UR - http://www.scopus.com/inward/record.url?scp=2442453367&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2442453367&partnerID=8YFLogxK

U2 - 10.1557/proc-804-jj9.21

DO - 10.1557/proc-804-jj9.21

M3 - Conference article

AN - SCOPUS:2442453367

VL - 804

SP - 249

EP - 254

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

SN - 0272-9172

T2 - Combinatorial and Artificial Intelligence Methods in Materials Science II

Y2 - 1 December 2003 through 4 December 2003

ER -