The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures

Sohei Okazaki; Noriaki Okazaki; Hidetaka Sugaya; Xiaoru Zhao; Ken Hasegawa; Parhat Ahmet; Toyohiro Chikyow; Jun Nishimura; Tomoteru Fukumura; Masashi Kawasaki; Makoto Murakami; Yuji Mastumoto; Hideomi Koinuma; Tetsuya Hasegawa

doi:10.1557/proc-804-jj9.21

The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures

Sohei Okazaki, Noriaki Okazaki, Hidetaka Sugaya, Xiaoru Zhao, Ken Hasegawa, Parhat Ahmet, Toyohiro Chikyow, Jun Nishimura, Tomoteru Fukumura, Masashi Kawasaki, Makoto Murakami, Yuji Mastumoto, Hideomi Koinuma, Tetsuya Hasegawa

Research output: Contribution to journal › Conference article

Abstract

We developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.

Original language	English
Pages (from-to)	249-254
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	804
DOIs	https://doi.org/10.1557/proc-804-jj9.21
Publication status	Published - 2003 Jan 1
Event	Combinatorial and Artificial Intelligence Methods in Materials Science II - Boston, MA., United States Duration: 2003 Dec 1 → 2003 Dec 4

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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Okazaki, S., Okazaki, N., Sugaya, H., Zhao, X., Hasegawa, K., Ahmet, P., Chikyow, T., Nishimura, J., Fukumura, T., Kawasaki, M., Murakami, M., Mastumoto, Y., Koinuma, H., & Hasegawa, T. (2003). The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures. Materials Research Society Symposium - Proceedings, 804, 249-254. https://doi.org/10.1557/proc-804-jj9.21

The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures. / Okazaki, Sohei; Okazaki, Noriaki; Sugaya, Hidetaka; Zhao, Xiaoru; Hasegawa, Ken; Ahmet, Parhat; Chikyow, Toyohiro; Nishimura, Jun; Fukumura, Tomoteru; Kawasaki, Masashi; Murakami, Makoto; Mastumoto, Yuji; Koinuma, Hideomi; Hasegawa, Tetsuya.

In: Materials Research Society Symposium - Proceedings, Vol. 804, 01.01.2003, p. 249-254.

Research output: Contribution to journal › Conference article

Okazaki, S, Okazaki, N, Sugaya, H, Zhao, X, Hasegawa, K, Ahmet, P, Chikyow, T, Nishimura, J, Fukumura, T, Kawasaki, M, Murakami, M, Mastumoto, Y, Koinuma, H & Hasegawa, T 2003, 'The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures', Materials Research Society Symposium - Proceedings, vol. 804, pp. 249-254. https://doi.org/10.1557/proc-804-jj9.21

Okazaki, Sohei ; Okazaki, Noriaki ; Sugaya, Hidetaka ; Zhao, Xiaoru ; Hasegawa, Ken ; Ahmet, Parhat ; Chikyow, Toyohiro ; Nishimura, Jun ; Fukumura, Tomoteru ; Kawasaki, Masashi ; Murakami, Makoto ; Mastumoto, Yuji ; Koinuma, Hideomi ; Hasegawa, Tetsuya. / The development of scanning microwave microscope for high-throughput characterization of dielectric and conducting materials at low temperatures. In: Materials Research Society Symposium - Proceedings. 2003 ; Vol. 804. pp. 249-254.

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AU - Ahmet, Parhat

AU - Chikyow, Toyohiro

AU - Nishimura, Jun

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AU - Kawasaki, Masashi

AU - Murakami, Makoto

AU - Mastumoto, Yuji

AU - Koinuma, Hideomi

AU - Hasegawa, Tetsuya

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