The degradation prevention of resin materials for semiconductor manufacturing equipment by applying the ultra-high purity gas supply technology

Atsushi Hidaka, Satoru Yamashita, Naoki Tanahashi, Hidekazu Ishii, Masafumi Kitano, Yasuyuki Shirai, Tadahiro Ohrni

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds