Testing of a probe for profile measurement of aspherical surface

Atsushi Shibuya, Yoshikazu Arai, Wei Gao, Satoshi Kiyono

Research output: Contribution to conferencePaper

Abstract

To test an air-bearing displacement probe for aspherical surface measurement, measurements at various contact angles are carried out. A laser interferometer is employed as the reference in the measurement. Two methods are also presented to measure the profile error of the probe sphere through scanning a sample sphere. In the first method, two repeated scanning is conducted along the redial direction of the sample sphere before and after a small rotation of the sample sphere. In the second and the sample sphere is scanned while it is rotated by the spindle. The profile error of the sample sphere can be separated by data processing in each of the method.

Original languageEnglish
Pages331-334
Number of pages4
Publication statusPublished - 2005 Dec 1
Event3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005 - Nagoya, Japan
Duration: 2005 Oct 192005 Oct 22

Other

Other3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005
CountryJapan
CityNagoya
Period05/10/1905/10/22

Keywords

  • Accuracy
  • Air-bearing displacement probe
  • Aspherical profile
  • Measurement
  • Probe sphere

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Shibuya, A., Arai, Y., Gao, W., & Kiyono, S. (2005). Testing of a probe for profile measurement of aspherical surface. 331-334. Paper presented at 3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005, Nagoya, Japan.