Ternary phase relation on preparation of YBa2Cu 3O7-δ films by laser CVD

Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


C-axis-oriented YBa2Cu3O7-δ films were prepared by laser chemical vapor deposition (laser CVD) using Y(DPM) 3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. YBa 2Cu3O7-δ film almost in a single phase and that with different second phases of BaCuO2, CuBaO2, BaY2O4, CuYO2, Y2O3 and CuO were obtained by varying evaporation temperature of precursors. Ternary phase diagram as a function of evaporation amount of three precursors were obtained. The deposition rate of the C-axis-oriented YBCO film was 60 μmh-1, about 60-600 times higher than those of conventional CVD.

Original languageEnglish
Title of host publicationAdvanced Engineering Ceramics and Composites
PublisherTrans Tech Publications Ltd
Number of pages5
ISBN (Print)9783037851814
Publication statusPublished - 2011

Publication series

NameKey Engineering Materials
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795


  • High deposition rate
  • Laser chemical deposition
  • Ternary phase diagram
  • YBCO film

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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