Temporary bonding strength control for self-assembly-based 3D integration

Takafumi Fukushima, Yuki Ohara, Jichoru Be, Mariappan Murugesan, Kanuku Ri, Tetsu Tanaka, Mitsumasa Koyanagi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science