Temporary bonding strength control for self-assembly-based 3D integration

Takafumi Fukushima, Yuki Ohara, Jichoru Be, Mariappan Murugesan, Kanuku Ri, Tetsu Tanaka, Mitsumasa Koyanagi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We have demonstrated bonding strength control for self-assembly-based 3D integration in which many chips are instantly assembled on a wafer all at once by using liquid droplets, and then, temporarily bonded to the wafer. The wafer is named Reconfigured Wafer. The self-assembly-based multichip-to-wafer 3D stacking is called reconfigured-wafer-to-wafer 3D integration. The alignment accuracy is found to be within 1 μm and the temporal bonding strength is well controlled by the quality of oxides as a bonding interface material, liquid types (concentration of additives), total bonding area, and surface roughness of the oxides. The self-assembled and temporarily bonded chips are successfully transferred to another wafer in a face-to-face bonding manner in batch processing.

Original languageEnglish
Title of host publication2011 IEEE International 3D Systems Integration Conference, 3DIC 2011
DOIs
Publication statusPublished - 2011 Dec 1
Event2011 IEEE International 3D Systems Integration Conference, 3DIC 2011 - Osaka, Japan
Duration: 2012 Jan 312012 Feb 2

Publication series

Name2011 IEEE International 3D Systems Integration Conference, 3DIC 2011

Other

Other2011 IEEE International 3D Systems Integration Conference, 3DIC 2011
CountryJapan
CityOsaka
Period12/1/3112/2/2

ASJC Scopus subject areas

  • Control and Systems Engineering

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