Temperature-Sensitive Magnetic Thin-Film for Micro Sensor

Hiroshi Osada, Kyoshiro Seki, Hidetoshi Matsuki, Shinki Kikuchi, Koichi Murakami

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

A temperature-sensitive magnetic thin-film (TMT) is made by sputtering Mn-Zn ferrite. Temperature-sensitive magnetic cores and thick-films have already been fabricated, however a magnetic thin-film with temperature dependence has not been shown yet. The authors developed a TMT by a new method with RF sputter a TMT utilizing a low Curie temperature Mn-Zn ferrite core as a target. The TMT with quick thermal response can be used as a micro temperature sensor, a thermomagnetic transducer or a photomagnetic device.

Original languageEnglish
Pages (from-to)3164-3166
Number of pages3
JournalIEEE Transactions on Magnetics
Volume31
Issue number6
DOIs
Publication statusPublished - 1995 Jan 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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