Temperature-programmed desorption study on the outgassing process from aluminum surface

M. Suemitsu, Y. Tsukidate, N. Miyamoto

Research output: Contribution to journal › Article

Abstract

Temperature-programmed desorption (TPD) has been applied for the first time to a study of time-dependent outgassing process from a metal surface. The TPD area which corresponds to the adsorbate coverage, decreased with the pumping time t, whose temporal dependence t-β/(1~β) quantitatively agreed well with what was predicted by the Freundlich adsorption isotherm and Mizuno-Horikoshi theory. The H2O-TPD spectra consist of a peak at around 90°C in which the desorption proceeds from lower temperatures towards higher temperatures, and a broad background appearing at 100<T<500°C, in which the desorption proceeds rather uniformly irrespective of the desorption temperature. The presence of the latter suggests an unidentified desorption mode from the metal surface.

Original languageEnglish
Pages (from-to)733-735
Number of pages3
JournalVacuum
Volume47
Issue number6-8
Publication statusPublished - 1996 Jan 1

Keywords

  • Adsorption isotherm
  • Aluminum
  • Outgassing rate
  • Temperature-programmed desorption
  • Thermal desorption spectroscopy

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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    Suemitsu, M., Tsukidate, Y., & Miyamoto, N. (1996). Temperature-programmed desorption study on the outgassing process from aluminum surface. Vacuum, 47(6-8), 733-735.