Abstract
Temperature-programmed desorption (TPD) has been applied for the first time to a study of time-dependent outgassing process from a metal surface. The TPD area which corresponds to the adsorbate coverage, decreased with the pumping time t, whose temporal dependence t-β/(1~β) quantitatively agreed well with what was predicted by the Freundlich adsorption isotherm and Mizuno-Horikoshi theory. The H2O-TPD spectra consist of a peak at around 90°C in which the desorption proceeds from lower temperatures towards higher temperatures, and a broad background appearing at 100<T<500°C, in which the desorption proceeds rather uniformly irrespective of the desorption temperature. The presence of the latter suggests an unidentified desorption mode from the metal surface.
Original language | English |
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Pages (from-to) | 733-735 |
Number of pages | 3 |
Journal | Vacuum |
Volume | 47 |
Issue number | 6-8 |
Publication status | Published - 1996 Jan 1 |
Keywords
- Adsorption isotherm
- Aluminum
- Outgassing rate
- Temperature-programmed desorption
- Thermal desorption spectroscopy
ASJC Scopus subject areas
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films