Temperature dependence of oxide decomposition on titanium surfaces in ultrahigh vacuum

Y. Mizuno, F. K. King, Y. Yamauchi, T. Homma, A. Tanaka, Y. Takakuwa, T. Momose

Research output: Contribution to journalArticlepeer-review

51 Citations (Scopus)

Abstract

The temperature dependence of oxide decomposition on titanium surfaces in ultrahigh vacuum was discussed. Drastic changes of the titanium dioxide core x-ray photoelectron spectroscopy (XPS) levels were found such that the TiO2 decomposed into suboxides at 180 °C. The analysis showed that surface oxide composition on titanium was sensitive to the temperature.

Original languageEnglish
Pages (from-to)1716-1721
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume20
Issue number5
DOIs
Publication statusPublished - 2002 Sep

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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