Temperature dependence of oxide decomposition on titanium surfaces in ultrahigh vacuum

Y. Mizuno; F. K. King; Y. Yamauchi; T. Homma; A. Tanaka; Y. Takakuwa; T. Momose

doi:10.1116/1.1500746

Temperature dependence of oxide decomposition on titanium surfaces in ultrahigh vacuum

Y. Mizuno, F. K. King, Y. Yamauchi, T. Homma, A. Tanaka, Y. Takakuwa, T. Momose

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

54 Citations (Scopus)

Abstract

The temperature dependence of oxide decomposition on titanium surfaces in ultrahigh vacuum was discussed. Drastic changes of the titanium dioxide core x-ray photoelectron spectroscopy (XPS) levels were found such that the TiO₂ decomposed into suboxides at 180 °C. The analysis showed that surface oxide composition on titanium was sensitive to the temperature.

Original language	English
Pages (from-to)	1716-1721
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	20
Issue number	5
DOIs	https://doi.org/10.1116/1.1500746
Publication status	Published - 2002 Sep

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "The temperature dependence of oxide decomposition on titanium surfaces in ultrahigh vacuum was discussed. Drastic changes of the titanium dioxide core x-ray photoelectron spectroscopy (XPS) levels were found such that the TiO2 decomposed into suboxides at 180 °C. The analysis showed that surface oxide composition on titanium was sensitive to the temperature.",

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AU - Tanaka, A.

AU - Takakuwa, Y.

AU - Momose, T.

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AB - The temperature dependence of oxide decomposition on titanium surfaces in ultrahigh vacuum was discussed. Drastic changes of the titanium dioxide core x-ray photoelectron spectroscopy (XPS) levels were found such that the TiO2 decomposed into suboxides at 180 °C. The analysis showed that surface oxide composition on titanium was sensitive to the temperature.

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Temperature dependence of oxide decomposition on titanium surfaces in ultrahigh vacuum

Abstract

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