Temperature compensation method of Φ 1 mm ball SAWgas sensor using harmonics

Dongyoun Sim, Maxey Bryan, Nobuo Takeda, Noritaka Nakaso, Naoya Iwata, Toshihiro Tsuji, Kazushi Yamanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Newly designed Φ 1mm ball SAW device with a double electrode IDT has a fundamental frequency of 80[MHz], third and fifth harmonics. A difference of the delay time between the fundamental frequency component and a higher harmonic was used to compensate the temperature drift. A temperature coefficient of about 1[ppm/ °C ] was obtained after compensation.

Original languageEnglish
Title of host publication2007 IEEE Ultrasonics Symposium Proceedings, IUS
Number of pages4
Publication statusPublished - 2007 Dec 1
Event2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117


Other2007 IEEE Ultrasonics Symposium, IUS
Country/TerritoryUnited States
CityNew York, NY

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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