Temperature characteristics of vibrating type sensor using micromachined optical fiber-tip

Hironori Kumazaki; Seiki Inaba; Kazuhiro Hane

doi:10.1007/s10043-996-0135-1

Temperature characteristics of vibrating type sensor using micromachined optical fiber-tip

Hironori Kumazaki, Seiki Inaba, Kazuhiro Hane

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

An optical sensor using a quartz core microcantilever was fabricated by etching clad layer from optical fiber. The temperature dependence of the resonance frequency of this sensor was measured in atmosphere and water. The temperature coefficient of the resonance frequency in water was 1.3×10^-3/°C, which was about one order larger than that (2.3×10^-4/°C) in atmosphere. This was caused by increase of additional mass due to temperature dependence of the viscosity of water, while, the increase of the resonance frequency in atmosphere was caused by temperature dependence of Young's modulus of the quartz core. These results were evaluated theoretically using a "string-of-beads" model.

Original language	English
Pages (from-to)	135-138
Number of pages	4
Journal	Optical Review
Volume	3
Issue number	2
DOIs	https://doi.org/10.1007/s10043-996-0135-1
Publication status	Published - 1996 Jan 1

Keywords

Micromachine
Optical fiber
Photothermal effect
Temperature dependence
Vibrating type sensor

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

Access to Document

10.1007/s10043-996-0135-1

Cite this

@article{0010adb4d90141ccb282a43cb9aca149,

title = "Temperature characteristics of vibrating type sensor using micromachined optical fiber-tip",

abstract = "An optical sensor using a quartz core microcantilever was fabricated by etching clad layer from optical fiber. The temperature dependence of the resonance frequency of this sensor was measured in atmosphere and water. The temperature coefficient of the resonance frequency in water was 1.3×10-3/°C, which was about one order larger than that (2.3×10-4/°C) in atmosphere. This was caused by increase of additional mass due to temperature dependence of the viscosity of water, while, the increase of the resonance frequency in atmosphere was caused by temperature dependence of Young's modulus of the quartz core. These results were evaluated theoretically using a {"}string-of-beads{"} model.",

keywords = "Micromachine, Optical fiber, Photothermal effect, Temperature dependence, Vibrating type sensor",

author = "Hironori Kumazaki and Seiki Inaba and Kazuhiro Hane",

year = "1996",

month = jan,

day = "1",

doi = "10.1007/s10043-996-0135-1",

language = "English",

volume = "3",

pages = "135--138",

journal = "Optical Review",

issn = "1340-6000",

publisher = "Springer-Verlag GmbH and Co. KG",

number = "2",

}

TY - JOUR

T1 - Temperature characteristics of vibrating type sensor using micromachined optical fiber-tip

AU - Kumazaki, Hironori

AU - Inaba, Seiki

AU - Hane, Kazuhiro

PY - 1996/1/1

Y1 - 1996/1/1

N2 - An optical sensor using a quartz core microcantilever was fabricated by etching clad layer from optical fiber. The temperature dependence of the resonance frequency of this sensor was measured in atmosphere and water. The temperature coefficient of the resonance frequency in water was 1.3×10-3/°C, which was about one order larger than that (2.3×10-4/°C) in atmosphere. This was caused by increase of additional mass due to temperature dependence of the viscosity of water, while, the increase of the resonance frequency in atmosphere was caused by temperature dependence of Young's modulus of the quartz core. These results were evaluated theoretically using a "string-of-beads" model.

AB - An optical sensor using a quartz core microcantilever was fabricated by etching clad layer from optical fiber. The temperature dependence of the resonance frequency of this sensor was measured in atmosphere and water. The temperature coefficient of the resonance frequency in water was 1.3×10-3/°C, which was about one order larger than that (2.3×10-4/°C) in atmosphere. This was caused by increase of additional mass due to temperature dependence of the viscosity of water, while, the increase of the resonance frequency in atmosphere was caused by temperature dependence of Young's modulus of the quartz core. These results were evaluated theoretically using a "string-of-beads" model.

KW - Micromachine

KW - Optical fiber

KW - Photothermal effect

KW - Temperature dependence

KW - Vibrating type sensor

UR - http://www.scopus.com/inward/record.url?scp=0030488357&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030488357&partnerID=8YFLogxK

U2 - 10.1007/s10043-996-0135-1

DO - 10.1007/s10043-996-0135-1

M3 - Article

AN - SCOPUS:0030488357

SN - 1340-6000

VL - 3

SP - 135

EP - 138

JO - Optical Review

JF - Optical Review

IS - 2

ER -

Temperature characteristics of vibrating type sensor using micromachined optical fiber-tip

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this