@article{100d6181ee104d10810569f7b3eae704,
title = "Technology for MEMS commercialization: Current status and future prospects",
keywords = "Commercialization, Design, Mems, Micro-mirrors, Micro-sensors, Micromachining, Products",
author = "Renshi Sawada and Eiji Higurashi",
year = "2010",
month = may,
doi = "10.2493/jjspe.76.491",
language = "English",
volume = "76",
pages = "491--497",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "5",
}