Technique for preparing defect-free spray coated resist film on three-dimensional micro-electromechanical systems

Vijay Kumar Singh, Minoru Sasaki, Jong Hyeong Song, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Technique for preparing defect-free spray coated resist film on three-dimensional micro-electromechanical systems'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science