Technique for preparing defect-free spray coated resist film

V. Kumar Singh, M. Sasaki, Jong Hyeong Song, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Up to now some 3-D (three-dimensional) devices have been demonstrated using the spray coating of photoresist. Since the detail of the technical performance is not clear, the spray coating technique is still in its infancy. In this study, a technique for preparing the defect-free spray coated resist film is described. A solvent (thinner) vapor is used to fill the pinhole assisting the resist flow. Since this flow is generated by the surface tension, it degrades the uniformity of the resist film on the cavity by decreasing the thickness at convex corner. The balance between the removing effect of pinholes and the thinning effect at convex corners is examined finding the appropriate condition.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages817-820
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003 Jan 1
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Coatings
  • Degradation
  • Lithography
  • Mechatronics
  • Optical films
  • Resists
  • Spraying
  • Surface tension
  • Temperature control
  • Thickness measurement

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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