Technical development of profile measurement for the soft X-ray via compton backward scattering

T. Saito, D. Oshima, K. Ueyama, S. Hidume, Y. Minamiguchi, M. Hama, Washio, R. Kuroda, S. Kashiwagi, J. Urakawa, H. Hayano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


A compact X-ray source is required by such various fields as material development, biological science, and medical treatment. At Waseda University, we have succeeded to generate the soft X-ray of the wavelength within so-called water window region (250-500eV) via Compton backward scattering [1, 2] between 1047nm Nd:YLF laser and 4.6MeV high quality electron beam. Although this method equips some useful characters, e.g. high intensity, short pulse, energy variableness, etc, the X-ray generating system is compact enough to fit in tabletop size. In the next step, there rises two principal tasks; To make the soft X-ray intensity higher, 2-pass amplifier was utilized. To progress X-ray profile measurement techniques as preliminary experiments for biomicroscopy, we planned to irradiate X-ray to a resist film which is previously exposed by UV-lamp or get images with X-ray CCD. In this conference, we will show the experimental results and some future plans.

Original languageEnglish
Title of host publicationProceedings of the Particle Accelerator Conference, PAC 2005
Number of pages3
Publication statusPublished - 2005
Externally publishedYes
EventParticle Accelerator Conference, PAC 2005 - Knoxville, TN, United States
Duration: 2005 May 162005 May 20

Publication series

NameProceedings of the IEEE Particle Accelerator Conference


ConferenceParticle Accelerator Conference, PAC 2005
Country/TerritoryUnited States
CityKnoxville, TN

ASJC Scopus subject areas

  • Engineering(all)


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