A compact X-ray source is required by such various fields as material development, biological science, and medical treatment. At Waseda University, we have succeeded to generate the soft X-ray of the wavelength within so-called water window region (250-500eV) via Compton backward scattering [1, 2] between 1047nm Nd:YLF laser and 4.6MeV high quality electron beam. Although this method equips some useful characters, e.g. high intensity, short pulse, energy variableness, etc, the X-ray generating system is compact enough to fit in tabletop size. In the next step, there rises two principal tasks; To make the soft X-ray intensity higher, 2-pass amplifier was utilized. To progress X-ray profile measurement techniques as preliminary experiments for biomicroscopy, we planned to irradiate X-ray to a resist film which is previously exposed by UV-lamp or get images with X-ray CCD. In this conference, we will show the experimental results and some future plans.