TDS Evaluation of Outgassing Characteristics of Surfaces by Modulated Heating Method

Maki Suemitsu, Yutaka Uneme, Nobuo Miyamoto, Jiro Ishibe

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)154-157
Number of pages4
JournalShinku/Journal of the Vacuum Society of Japan
Volume35
Issue number3
DOIs
Publication statusPublished - 1992 Jan 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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