Tb-Fe Sputtered Films with Large Magnetostriction for Use in Magnetomechanical Thin-Film Devices

Y. Hayashi; M. Yamaguchi; K. I. Arai; T. Honda

doi:10.1109/TJMJ.1994.4565804

Tb-Fe Sputtered Films with Large Magnetostriction for Use in Magnetomechanical Thin-Film Devices

Y. Hayashi, M. Yamaguchi, K. I. Arai, T. Honda

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We examined the magnetostriction and coercive force of amorphous Tb-Fe films sputter-deposited under different conditions (rf input power, Ar gas pressure, Tb content, etc.). Here we discuss the possibility of obtaining both soft magnetic properties and a large magnetostriction in this system. Soft magnetic properties and large magnetostriction were obtained simultaneously in sputtered Tb-Fe thin films prepared with a Tb content of 45 to 50 at%, under an Ar gas pressure of 4 mTorr and with an rf input power of 200 W. This material has strong potential for use in magnetomechanical thin-film devices.

Original language	English
Pages (from-to)	124-128
Number of pages	5
Journal	IEEE Translation Journal on Magnetics in Japan
Volume	9
Issue number	1
DOIs	https://doi.org/10.1109/TJMJ.1994.4565804
Publication status	Published - 1994

ASJC Scopus subject areas

Engineering (miscellaneous)
Engineering(all)

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abstract = "We examined the magnetostriction and coercive force of amorphous Tb-Fe films sputter-deposited under different conditions (rf input power, Ar gas pressure, Tb content, etc.). Here we discuss the possibility of obtaining both soft magnetic properties and a large magnetostriction in this system. Soft magnetic properties and large magnetostriction were obtained simultaneously in sputtered Tb-Fe thin films prepared with a Tb content of 45 to 50 at%, under an Ar gas pressure of 4 mTorr and with an rf input power of 200 W. This material has strong potential for use in magnetomechanical thin-film devices.",

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AU - Hayashi, Y.

AU - Yamaguchi, M.

AU - Arai, K. I.

AU - Honda, T.

PY - 1994

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