TY - JOUR
T1 - Tb-Fe Sputtered Films with Large Magnetostriction for Use in Magnetomechanical Thin-Film Devices
AU - Hayashi, Y.
AU - Yamaguchi, M.
AU - Arai, K. I.
AU - Honda, T.
PY - 1994
Y1 - 1994
N2 - We examined the magnetostriction and coercive force of amorphous Tb-Fe films sputter-deposited under different conditions (rf input power, Ar gas pressure, Tb content, etc.). Here we discuss the possibility of obtaining both soft magnetic properties and a large magnetostriction in this system. Soft magnetic properties and large magnetostriction were obtained simultaneously in sputtered Tb-Fe thin films prepared with a Tb content of 45 to 50 at%, under an Ar gas pressure of 4 mTorr and with an rf input power of 200 W. This material has strong potential for use in magnetomechanical thin-film devices.
AB - We examined the magnetostriction and coercive force of amorphous Tb-Fe films sputter-deposited under different conditions (rf input power, Ar gas pressure, Tb content, etc.). Here we discuss the possibility of obtaining both soft magnetic properties and a large magnetostriction in this system. Soft magnetic properties and large magnetostriction were obtained simultaneously in sputtered Tb-Fe thin films prepared with a Tb content of 45 to 50 at%, under an Ar gas pressure of 4 mTorr and with an rf input power of 200 W. This material has strong potential for use in magnetomechanical thin-film devices.
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U2 - 10.1109/TJMJ.1994.4565804
DO - 10.1109/TJMJ.1994.4565804
M3 - Article
AN - SCOPUS:0028368010
VL - 9
SP - 124
EP - 128
JO - IEEE translation journal on magnetics in Japan
JF - IEEE translation journal on magnetics in Japan
SN - 0882-4959
IS - 1
ER -