Tapping mode scanning capacitance microscopy: Feasibility of quantitative capacitance measurement

Kazuya Goto, Kazuhiro Hane

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Abstract

Tapping mode scanning capacitance microscopy is a new technique to study local capacitances. It is a combination of the tapping mode scanning force microscopy and the scanning capacitance microscopy. With the tapping motion of the tip, tip-sample distance is accurately regulated. In addition, topographic images are simultaneously obtained together with the capacitive images. In this paper, feasibility of the quantitative capacitance determination is described. Experimental results with a silicon nitride film are compared with the theoretical curve. The effective electrode area (lateral resolution) and the tip-sample capacitance were calculated.

Original languageEnglish
Pages (from-to)84-91
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3009
DOIs
Publication statusPublished - 1997 Dec 1
EventMicromachining and Imaging - San Jose, CA, United States
Duration: 1997 Feb 131997 Feb 13

Keywords

  • Capacitance microscopy
  • Capacitance modulation
  • Dielectric thin film
  • Quantitative capacitance measurement
  • Tapping mode force microscopy
  • Tip-sample distance

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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