Abstract
Tapping mode scanning capacitance microscopy is a new technique to study local capacitances. It is a combination of the tapping mode scanning force microscopy and the scanning capacitance microscopy. With the tapping motion of the tip, tip-sample distance is accurately regulated. In addition, topographic images are simultaneously obtained together with the capacitive images. In this paper, feasibility of the quantitative capacitance determination is described. Experimental results with a silicon nitride film are compared with the theoretical curve. The effective electrode area (lateral resolution) and the tip-sample capacitance were calculated.
| Original language | English |
|---|---|
| Pages (from-to) | 84-91 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3009 |
| DOIs | |
| Publication status | Published - 1997 Dec 1 |
| Event | Micromachining and Imaging - San Jose, CA, United States Duration: 1997 Feb 13 → 1997 Feb 13 |
Keywords
- Capacitance microscopy
- Capacitance modulation
- Dielectric thin film
- Quantitative capacitance measurement
- Tapping mode force microscopy
- Tip-sample distance
ASJC Scopus subject areas
- Applied Mathematics
- Computer Science Applications
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics