Tapping mode capacitance microscopy

Kazuya Goto, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

We present a new technique for microscopic capacitance measurements. Capacitance microscopy is combined with tapping mode force microscopy. The tapping motion is successfully used for the capacitance modulation and also for the tip-sample distance regulation. Furthermore, capacitive and topographic images are simultaneously obtained. The technique was applied to observations of a gratinglike electrode and of a nitride-oxide-silicon structure for a nonvolatile memory.

Original languageEnglish
Pages (from-to)120-123
Number of pages4
JournalReview of Scientific Instruments
Volume68
Issue number1
DOIs
Publication statusPublished - 1997 Jan 1

ASJC Scopus subject areas

  • Instrumentation

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