TY - JOUR
T1 - Take-off angle-dependent X-ray fluorescence analysis of thin films on acrylic substrate
AU - Tsuji, Kouichi
AU - Wagatsuma, K.
AU - Hirokawa, Kichinosuke
PY - 1997
Y1 - 1997
N2 - Evaporated thin films of Au, Pb, Ni, Mn and Ti on acrylic substrates were analyzed by the take-off angle-dependent X-ray fluorescence method. A peak of the take-off-angle-dependent curve was observed in the take-off angle range below the zero angle besides the normal peak above the zero angle. We considered that this additional peak was produced by the optical interference between the transmitted X-rays and the reflected X-rays in the thin film, and was observed through the side wall of the acrylic substrate because the linear absorption coefficient of the fluorescent X-rays in the acrylic plate was small. By using these peaks, the zero angle was determined, and the density and thickness of the thin films were estimated by the fitting method.
AB - Evaporated thin films of Au, Pb, Ni, Mn and Ti on acrylic substrates were analyzed by the take-off angle-dependent X-ray fluorescence method. A peak of the take-off-angle-dependent curve was observed in the take-off angle range below the zero angle besides the normal peak above the zero angle. We considered that this additional peak was produced by the optical interference between the transmitted X-rays and the reflected X-rays in the thin film, and was observed through the side wall of the acrylic substrate because the linear absorption coefficient of the fluorescent X-rays in the acrylic plate was small. By using these peaks, the zero angle was determined, and the density and thickness of the thin films were estimated by the fitting method.
KW - Thin film
KW - Total reflection
KW - X-ray fluorescence
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M3 - Article
AN - SCOPUS:11744324336
VL - 15
SP - 1
EP - 11
JO - Journal of Trace and Microprobe Techniques
JF - Journal of Trace and Microprobe Techniques
SN - 0733-4680
IS - 1
ER -