Take-off angle-dependent X-ray fluorescence analysis of thin films on acrylic substrate

Kouichi Tsuji, K. Wagatsuma, Kichinosuke Hirokawa

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Evaporated thin films of Au, Pb, Ni, Mn and Ti on acrylic substrates were analyzed by the take-off angle-dependent X-ray fluorescence method. A peak of the take-off-angle-dependent curve was observed in the take-off angle range below the zero angle besides the normal peak above the zero angle. We considered that this additional peak was produced by the optical interference between the transmitted X-rays and the reflected X-rays in the thin film, and was observed through the side wall of the acrylic substrate because the linear absorption coefficient of the fluorescent X-rays in the acrylic plate was small. By using these peaks, the zero angle was determined, and the density and thickness of the thin films were estimated by the fitting method.

Original languageEnglish
Pages (from-to)1-11
Number of pages11
JournalJournal of Trace and Microprobe Techniques
Issue number1
Publication statusPublished - 1997


  • Thin film
  • Total reflection
  • X-ray fluorescence

ASJC Scopus subject areas

  • Analytical Chemistry


Dive into the research topics of 'Take-off angle-dependent X-ray fluorescence analysis of thin films on acrylic substrate'. Together they form a unique fingerprint.

Cite this