Synthesis of titanium carbonitride films by physical vapour deposition and their structure

Yuji Enomoto, Kazushi Yamanaka

Research output: Contribution to journalArticle

13 Citations (Scopus)
Original languageEnglish
Pages (from-to)L201-L203
JournalThin Solid Films
Volume86
Issue number1
DOIs
Publication statusPublished - 1981 Nov 27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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