Synthesis of SiC/SiO2 core-shell powder by rotary chemical vapor deposition and its consolidation by spark plasma sintering

Zhenhua He, Rong Tu, Hirokazu Katsui, Takashi Goto

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

SiC (core) and SiO2 (shell) powders were synthesized via rotary chemical vapor deposition (RCVD). The SiC particles (3C, <1 μm in diameter) were coated with a layer of SiO2 (10-15 nm in thickness). Using spark plasma sintering, the SiC/SiO2 nanopowders were then synthesized into SiC/SiO2 composite bodies. Although a phase transformation from 3C to 6H was observed at above 2123 K in the sintered monolithic SiC bodies, sintered SiC/SiO2 bodies did not display such phase transformation. In addition, SiC/SiO2 bodies did not exhibited grain growth until the sintering temperature reached 2223 K. The density and Vickers hardness of the sintered SiC/SiO2 bodies increased with increasing sintering temperature. The highest density and hardness of SiC/SiO2 composite bodies were 98.1% and 24.4 GPa at 2223 K, respectively, which were higher than the corresponding values of 90% and 14 GPa for monolithic SiC bodies.

Original languageEnglish
Pages (from-to)2605-2610
Number of pages6
JournalCeramics International
Volume39
Issue number3
DOIs
Publication statusPublished - 2013 Apr 1

Keywords

  • Rotary chemical vapor deposition (RCVD)
  • SiO nano-layer
  • Silicon carbide (SiC)
  • Spark plasma sintering (SPS)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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