Synthesis of BaTiO3 thin films substituted with hafnium and zirconium by a laser ablation method using the fourth-harmonic wave of a YAG laser

Yoichiro Masuda, Shigetaka Fujita, Akira Baba, Hiroshi Masumoto, Kunihiro Nagata, Toshio Hirai

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

For the first time to our knowledge, BaTi(Hf0.5Zr0.5)O3 (BTHZ) thin films have been successfully synthesized using a laser ablation technique that employs the fourth harmonic wave of a pulsed YAG (FHG-YAG) laser. The BTHZ thin film with a preferred orientation in the c-axis was prepared under an oxygen gas pressure of 3 Pa at 800°C. Chemical bonds in the BTHZ compounds can easily be broken by irradiation at an optical energy of 7.47 × 10-19 J and an optical power density of 300 mJ/cm2. Crystallinity of the deposited films is dominated by the mean free path of each element.

Original languageEnglish
Pages (from-to)5834-5839
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number9 SUPPL. B
DOIs
Publication statusPublished - 1997 Sep

Keywords

  • BaTi(HfZr)O
  • BaTiO family
  • Ferroelectrics
  • Fourth harmonic generation
  • Thin films
  • YAG laser ablation

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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