Synthesis of BaTiO3 thin films substituted with hafnium and zirconium by a laser ablation method using the fourth-harmonic wave of a YAG laser

Yoichiro Masuda; Shigetaka Fujita; Akira Baba; Hiroshi Masumoto; Kunihiro Nagata; Toshio Hirai

doi:10.1143/jjap.36.5834

Synthesis of BaTiO₃ thin films substituted with hafnium and zirconium by a laser ablation method using the fourth-harmonic wave of a YAG laser

Yoichiro Masuda, Shigetaka Fujita, Akira Baba, Hiroshi Masumoto, Kunihiro Nagata, Toshio Hirai

Advanced Interdisciplinary Research Division

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

For the first time to our knowledge, BaTi(Hf_0.5Zr_0.5)O₃ (BTHZ) thin films have been successfully synthesized using a laser ablation technique that employs the fourth harmonic wave of a pulsed YAG (FHG-YAG) laser. The BTHZ thin film with a preferred orientation in the c-axis was prepared under an oxygen gas pressure of 3 Pa at 800°C. Chemical bonds in the BTHZ compounds can easily be broken by irradiation at an optical energy of 7.47 × 10^-19 J and an optical power density of 300 mJ/cm². Crystallinity of the deposited films is dominated by the mean free path of each element.

Original language	English
Pages (from-to)	5834-5839
Number of pages	6
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	36
Issue number	9 SUPPL. B
DOIs	https://doi.org/10.1143/jjap.36.5834
Publication status	Published - 1997 Sept

Keywords

BaTi(HfZr)O
BaTiO family
Ferroelectrics
Fourth harmonic generation
Thin films
YAG laser ablation

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/jjap.36.5834

Cite this

Masuda, Y., Fujita, S., Baba, A., Masumoto, H., Nagata, K., & Hirai, T. (1997). Synthesis of BaTiO₃ thin films substituted with hafnium and zirconium by a laser ablation method using the fourth-harmonic wave of a YAG laser. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 36(9 SUPPL. B), 5834-5839. https://doi.org/10.1143/jjap.36.5834

Synthesis of BaTiO₃ thin films substituted with hafnium and zirconium by a laser ablation method using the fourth-harmonic wave of a YAG laser. / Masuda, Yoichiro; Fujita, Shigetaka; Baba, Akira et al.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 36, No. 9 SUPPL. B, 09.1997, p. 5834-5839.

Research output: Contribution to journal › Article › peer-review

Masuda, Y, Fujita, S, Baba, A, Masumoto, H, Nagata, K & Hirai, T 1997, 'Synthesis of BaTiO₃ thin films substituted with hafnium and zirconium by a laser ablation method using the fourth-harmonic wave of a YAG laser', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 36, no. 9 SUPPL. B, pp. 5834-5839. https://doi.org/10.1143/jjap.36.5834

@article{658609900ef444c98f3ed77baa6d89b4,

title = "Synthesis of BaTiO3 thin films substituted with hafnium and zirconium by a laser ablation method using the fourth-harmonic wave of a YAG laser",

abstract = "For the first time to our knowledge, BaTi(Hf0.5Zr0.5)O3 (BTHZ) thin films have been successfully synthesized using a laser ablation technique that employs the fourth harmonic wave of a pulsed YAG (FHG-YAG) laser. The BTHZ thin film with a preferred orientation in the c-axis was prepared under an oxygen gas pressure of 3 Pa at 800°C. Chemical bonds in the BTHZ compounds can easily be broken by irradiation at an optical energy of 7.47 × 10-19 J and an optical power density of 300 mJ/cm2. Crystallinity of the deposited films is dominated by the mean free path of each element.",

keywords = "BaTi(HfZr)O, BaTiO family, Ferroelectrics, Fourth harmonic generation, Thin films, YAG laser ablation",

author = "Yoichiro Masuda and Shigetaka Fujita and Akira Baba and Hiroshi Masumoto and Kunihiro Nagata and Toshio Hirai",

year = "1997",

month = sep,

doi = "10.1143/jjap.36.5834",

language = "English",

volume = "36",

pages = "5834--5839",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "9 SUPPL. B",

}

TY - JOUR

T1 - Synthesis of BaTiO3 thin films substituted with hafnium and zirconium by a laser ablation method using the fourth-harmonic wave of a YAG laser

AU - Masuda, Yoichiro

AU - Fujita, Shigetaka

AU - Baba, Akira

AU - Masumoto, Hiroshi

AU - Nagata, Kunihiro

AU - Hirai, Toshio

PY - 1997/9

Y1 - 1997/9

N2 - For the first time to our knowledge, BaTi(Hf0.5Zr0.5)O3 (BTHZ) thin films have been successfully synthesized using a laser ablation technique that employs the fourth harmonic wave of a pulsed YAG (FHG-YAG) laser. The BTHZ thin film with a preferred orientation in the c-axis was prepared under an oxygen gas pressure of 3 Pa at 800°C. Chemical bonds in the BTHZ compounds can easily be broken by irradiation at an optical energy of 7.47 × 10-19 J and an optical power density of 300 mJ/cm2. Crystallinity of the deposited films is dominated by the mean free path of each element.

AB - For the first time to our knowledge, BaTi(Hf0.5Zr0.5)O3 (BTHZ) thin films have been successfully synthesized using a laser ablation technique that employs the fourth harmonic wave of a pulsed YAG (FHG-YAG) laser. The BTHZ thin film with a preferred orientation in the c-axis was prepared under an oxygen gas pressure of 3 Pa at 800°C. Chemical bonds in the BTHZ compounds can easily be broken by irradiation at an optical energy of 7.47 × 10-19 J and an optical power density of 300 mJ/cm2. Crystallinity of the deposited films is dominated by the mean free path of each element.

KW - BaTi(HfZr)O

KW - BaTiO family

KW - Ferroelectrics

KW - Fourth harmonic generation

KW - Thin films

KW - YAG laser ablation

UR - http://www.scopus.com/inward/record.url?scp=0031220493&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031220493&partnerID=8YFLogxK

U2 - 10.1143/jjap.36.5834

DO - 10.1143/jjap.36.5834

M3 - Article

AN - SCOPUS:0031220493

SN - 0021-4922

VL - 36

SP - 5834

EP - 5839

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 9 SUPPL. B

ER -