Synthesis of BaxSr1-xTiO3 thin films from complex alkoxide solutions

Tomoaki Satoh, Makoto Ogawa, Mikio Konno

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

High dielectric barium-strontium-titanate (Ba0.5Sr0.5)TiO3 (BST) thin films were fabricated by a spincoating technique. The fabrication process consisted of three steps. First, a complex alkoxide was synthesized from barium, strontium and Ti-alkoxide (titanium tetraethoxide) in 2-methoxyethanol at 125°C for 3h. Then, hydrolysis and condensation reactions of the complex alkoxide were carried out at 75°C in 2-methoxyethanol containing nitric acid as a catalysis. Finally, the sols obtained by hydrolysis and condensation of Ba-Sr-Ti complex alkoxide were casted onto glass substrates. The films were subjected to heat treatment at temperatures between 350 and 900°C. The films started to crystallize into a perovskite structure BST at 500°C, and were well-crystallized at 525-550°C. The BST films that were heat-treated at 550°C had dielectric constant exceeding 2000 at 800 Hz.

Original languageEnglish
Pages (from-to)1151-1154
Number of pages4
JournalJournal of the Ceramic Society of Japan
Volume106
Issue number11
DOIs
Publication statusPublished - 1998 Nov

Keywords

  • BST
  • Complex alkoxide
  • Condensation
  • Dielectric constant
  • Hydrolysis
  • Spin-coating
  • Thin film

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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