Synthesis and characterization of carbon nanotube-Cu composite using supercritical fluid deposition

Zhonglie An; Masaya Toda; Takahito Ono

doi:10.1541/ieejsmas.134.38

Synthesis and characterization of carbon nanotube-Cu composite using supercritical fluid deposition

Zhonglie An, Masaya Toda, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Contribution to journal › Article

Abstract

We propose a new approach to synthesize a carbon nanotube (CNT) - copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. The measured density of the composite is 8.2 ± 0.3 g/cm³, and the volume percentage of voids is 3~6%. The evaluated thermal resistance including the thermal interface resistance and bulk resistance of the composite is 28.4~42.1 mm² KW^-1. It shows the potential ability of the CNTs-Cu composite for thermal interface material.

Original language	English
Pages (from-to)	38-39
Number of pages	2
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	134
Issue number	2
DOIs	https://doi.org/10.1541/ieejsmas.134.38
Publication status	Published - 2014 Feb 10

Keywords

Carbon nanotubes-Cu composite
Supercritical fluid deposition
Thermal interface resistance

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1541/ieejsmas.134.38

Fingerprint Dive into the research topics of 'Synthesis and characterization of carbon nanotube-Cu composite using supercritical fluid deposition'. Together they form a unique fingerprint.

Cite this

An, Z., Toda, M., & Ono, T. (2014). Synthesis and characterization of carbon nanotube-Cu composite using supercritical fluid deposition. IEEJ Transactions on Sensors and Micromachines, 134(2), 38-39. https://doi.org/10.1541/ieejsmas.134.38

@article{710ffe799b9f45d8ac57fdcf54b3d1cd,

title = "Synthesis and characterization of carbon nanotube-Cu composite using supercritical fluid deposition",

abstract = "We propose a new approach to synthesize a carbon nanotube (CNT) - copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. The measured density of the composite is 8.2 ± 0.3 g/cm3, and the volume percentage of voids is 3~6%. The evaluated thermal resistance including the thermal interface resistance and bulk resistance of the composite is 28.4~42.1 mm2 KW-1. It shows the potential ability of the CNTs-Cu composite for thermal interface material.",

keywords = "Carbon nanotubes-Cu composite, Supercritical fluid deposition, Thermal interface resistance",

author = "Zhonglie An and Masaya Toda and Takahito Ono",

year = "2014",

month = feb,

day = "10",

doi = "10.1541/ieejsmas.134.38",

language = "English",

volume = "134",

pages = "38--39",

journal = "IEEJ Transactions on Sensors and Micromachines",

issn = "1341-8939",

publisher = "The Institute of Electrical Engineers of Japan",

number = "2",

}

TY - JOUR

T1 - Synthesis and characterization of carbon nanotube-Cu composite using supercritical fluid deposition

AU - An, Zhonglie

AU - Toda, Masaya

AU - Ono, Takahito

PY - 2014/2/10

Y1 - 2014/2/10

N2 - We propose a new approach to synthesize a carbon nanotube (CNT) - copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. The measured density of the composite is 8.2 ± 0.3 g/cm3, and the volume percentage of voids is 3~6%. The evaluated thermal resistance including the thermal interface resistance and bulk resistance of the composite is 28.4~42.1 mm2 KW-1. It shows the potential ability of the CNTs-Cu composite for thermal interface material.

AB - We propose a new approach to synthesize a carbon nanotube (CNT) - copper (Cu) composite on a silicon substrate using combination of supercritical fluid deposition (SCFD) and electrochemical plating (ECP) process. The measured density of the composite is 8.2 ± 0.3 g/cm3, and the volume percentage of voids is 3~6%. The evaluated thermal resistance including the thermal interface resistance and bulk resistance of the composite is 28.4~42.1 mm2 KW-1. It shows the potential ability of the CNTs-Cu composite for thermal interface material.

KW - Carbon nanotubes-Cu composite

KW - Supercritical fluid deposition

KW - Thermal interface resistance

UR - http://www.scopus.com/inward/record.url?scp=84893266316&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84893266316&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.134.38

DO - 10.1541/ieejsmas.134.38

M3 - Article

AN - SCOPUS:84893266316

VL - 134

SP - 38

EP - 39

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

SN - 1341-8939

IS - 2

ER -