Switchable band-pass filter for terahertz waves using VO2-based metamaterial integrated with silicon substrate

Ying Huang, Qicong He, Dongping Zhang, Yoshiaki Kanamori

Research output: Contribution to journalArticlepeer-review


Terahertz (THz) waves are a promising candidate for detection, imaging, and advanced communications with ultrafast transmission speed. To develop THz technologies, miniaturized devices for controlling THz waves are essential. In this study, a high-performance vanadium dioxide (VO2)-based switchable band-pass metamaterial integrated with a silicon substrate for THz waves is designed and fabricated. In the “on” state, it offers a passband with a 70% depth and a 0.34 THz bandwidth at 0.56 THz frequency. Additionally, it can be switched thermally to a mirror for 0.1–2.0 THz waves in the “off” state by the phase transition effect of the VO2 film. Moreover, the relationship between the line width and spectra of the device is investigated by simulation. The wheel-shaped gold structure with round corners provides the filter with tractability during fabrication. Furthermore, the silicon substrate allows the metamaterial to be readily miniaturized and integrated into micro-electromechanical systems (MEMS) technology. This filter is expected to be favorable in frequency-selective THz applications.

Original languageEnglish
Pages (from-to)92-98
Number of pages7
JournalOptical Review
Issue number1
Publication statusPublished - 2021 Feb


  • Phase transition
  • Silicon substrate
  • Terahertz filter
  • VO-based metamaterial

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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